PEPS II-TMC 主动空气调平系统 PEPS®II 电子定位系统-青岛森泉光电有限公司

peps II是在TMC的peps (电子定位系统)基础上建立的并进行了改善。通过添加一个新的数字控制器使pep II的使用更简单，提供了更多的功能，并且具有改进的用户界面。peps II是用于TMC气浮隔振系统的数字式非接触高度控制系统。这种系统通常包含机械高度阀和机械高度传感装置，其应用范围从用于半导体制造设备提高沉降时间和增加产量，到要求噪声性能和稳定的平台的实验室环境。

特性和好处
•数字控制，用户友好的LCD接口
•用于Gimbal Piston，CSP和Maxdamp的非接触式电动气浮高度控制隔振系统
•z轴位置重复性:10微米
•通过消除常规机械高度控制系统的杠杆接触点改善隔振性能

•气浮前馈功能使z轴对x - y轴运动的反应达到小化

•可选“VX"功能集成惯性传感器，用于垂直隔离器共振主动阻尼

•比例电子阀。通过使用“开关"或传统电子阀门无脉冲噪声引入

Specifications

Physical Dimensions	PEPS® II Controller 1.72" (43.7mm) H x 8.0" (203mm) W x 9.4" (240 mm) D
Weights	PEPS® II Controller: approximately 3.0 lb (1.2 kg)
Environmental (refer to EN 61010-1: 1993, EN 61010-1/A2: 1995)	For indoor use only, up to an elevation of 2,000 m (6560 ft.) Maximum allowable temperature range: 5° C to 35° C Maximum allowable humidity: 80% up to 31° C, decreasing linearly to 50% relative humidity at 40° C Tolerance in main supply voltage: 85 VAC - 240 VAC Over voltage category: 2 Pollution degree (IEC 664): 2 Ventilation requirements: 25 mm clearance on sides, 0 mm top and bottom
Power Requirements	Power input voltage range: 90-230 VAC Input frequency range: 50-60 Hz
PEPS® II User Interface (Front Panel)	Power switch 4 menu buttons LCD display 20 x 2 characters 2 diagnostic sockets (BNC-type) Three-color status LED USB port
PEPS® II Interface (Rear Panel)	AC power entry with EMI filter 1 air INPUT snap-in port for 1/4" O.D. tubing 1 air OUTPUT (Exhaust) snap-in port for 1/4" O.D. tubing 4 air snap-in ports for 1/4" O.D. tubing (one per isolator) DB-25 male inputs-outputs and feedforward socket 1 Phoenix 0.2" pitch 6 pins GREEN header (vertical proximity sensors) 1 Phoenix 3.5 mm pitch 6 pins BLACK header (horizontal proximity sensors) Grounding threaded stud (#10-32 thread) DB-25 F socket: 1x digital Input, 3x geophone sensors interface (“-VX" option) DB-25 F socket: 1x digital input, 3x current output proximity sensors (optional)
PEPS® II Performance Specifications	Analog inputs (unipolar): 8 x 12 bit (16 bit using over sampling), 0…3.0 V full scale Analog inputs (feedforward): 5 x 12 bit (16 bit using over sampling), ±9 V full scale Analog inputs (unipolar) protection: +5 Volts, -0.5 V clipping Analog input (feedforward) protection: ±15 Volts clipping Analog outputs: 4 x 12 bit (16 bit with over sampling), 0…3.0 V full scale Analog outputs (OPTIONAL): 8 x 16 bit, 0…3.0 V full scale Analog output protection: indefinite short circuit protection, +5 Volts clipping Digital input voltage rating: 0…+3.3 V, +5 V tolerant (+5 Volts clipping) Digital output rating: 0…+3.3 V, 20 mA max. Digital I/O protection: +5 Volts, -0.5 Volts clipping External available power: +5 VDC, 2.0 A max; +15 VDC, 1.0 A max. (20 Watt max) Communication port: USB, appears as RS-232 on PC Processor: ARM7TDMI / 41.78 MHz Control loop rate: 100 Hz - 2.0 KHz Proximity sensors: 3x vertical, (3x horizontal optional) Eddy current, NAMUR 0-20 mA output Velocity sensors - geophones (“-VX" option): 3x vertical, current output
Pneumatic Specifications	Long-term height stability: ±50 microns Long-term tilt stability: ±50 micro radians Servo valves: 4 x 2-way variable-orifice proportional servo valves Valving technique: pure class-A Maximum input pressure: 120 PSI or 8.3 Bar or 830 KPa Nominal air consumption: 60 slpm (2 scfm) Air requirements: clean, dry air, filtered to 20 microns or better Fail safe: isolators deflate on power failure or power off Pneumatic fittings: &＃39;one touch&＃39; quick fittings for 1/4" O.D. hose